Counterfeit Integrated Circuits by Mark (Mohammad) Tehranipoor Ujjwal Guin & Domenic Forte
Author:Mark (Mohammad) Tehranipoor, Ujjwal Guin & Domenic Forte
Language: eng
Format: epub
Publisher: Springer International Publishing, Cham
Table 7.2Effect of remedies for horizontal axis of tilt
Height variation using image rotation
Height variation using scan rotation
Lateral length field of view using image rotation
Lateral length field of view using
365 nm
340 nm
270.02 μm
300.42 μm
Figure 7.5b–d demonstrate the orientation of the sample at untilted, positive tilting angles, and negative tilting angles respectively and at the same working distance.
B) Center shift and focus correction
During tilting, the sample will be shifted horizontally or vertically depending on the tilt axis. Figure 7.6 shows a schematic of the sample movement during tilting.
Fig. 7.6Schematic of the sample movement during the tilt. The figure is exaggerated for better visualization
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