Counterfeit Integrated Circuits by Mark (Mohammad) Tehranipoor Ujjwal Guin & Domenic Forte

Counterfeit Integrated Circuits by Mark (Mohammad) Tehranipoor Ujjwal Guin & Domenic Forte

Author:Mark (Mohammad) Tehranipoor, Ujjwal Guin & Domenic Forte
Language: eng
Format: epub
Publisher: Springer International Publishing, Cham


Table 7.2Effect of remedies for horizontal axis of tilt

Height variation using image rotation

Height variation using scan rotation

Lateral length field of view using image rotation

Lateral length field of view using

365 nm

340 nm

270.02 μm

300.42 μm

Figure 7.5b–d demonstrate the orientation of the sample at untilted, positive tilting angles, and negative tilting angles respectively and at the same working distance.

B) Center shift and focus correction

During tilting, the sample will be shifted horizontally or vertically depending on the tilt axis. Figure 7.6 shows a schematic of the sample movement during tilting.

Fig. 7.6Schematic of the sample movement during the tilt. The figure is exaggerated for better visualization



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